[labnetwork] Equipment Support for Strasbaugh CMP?

[mtkhbeis at gmail.com]

Call Dan Trojan at Axus Technology http://www.axustech.com/

Dr. Michael Khbeis
(C) 443.254.5192

> On Dec 11, 2018, at 7:58 AM, Jim Fraser <jfraser96 at byu.edu> wrote:
> 
> Dear Colleagues,
>  
> One of my researchers is trying to resurrect a Strasbaugh 6EC CMP system. He is having a problem with the wafer chuck not rotating. He said the company has been bought out and he can’t find anyone who supports the system. Does anyone have a contact that has been able to help with these older systems?
>  
> Thanks for your help,
>  
> James R Fraser
> IML Manager
> 460-L EB
> Brigham Young University
> 801-422-4344
>  
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