[labnetwork] Experience on ICP-RIE

[Fouad Karouta]

Hi Jun,

I also have experience with both.
In general you need to consider the service provided by the companies and this depends much on geographical area. Another general aspect you need to consider: combining the two Cl and F chemistries in one system may lead to non-reproducibility issues which may be overcome by setting a strict procedure when switching from one chemistry to the other.

If you need more discussions as Rich mentioned send an email off-line to the person directly.

Regards,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 2601, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of DeVito, Richard
Sent: Friday, 27 July 2018 6:01 AM
To: Chen, Jun <JUC48 at pitt.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Experience on ICP-RIE

Jun

we have systems from both manufacturers including an APEX SLR tool purchased less than 2 years ago
I can comment on my experience with both...you can call me in the office line to discuss
if you want. I am usually available from 8:45-9:30 and again around 12:00 -1:00

Rich DeVito
Principle Member Technical Staff
Group Leader Microfabrication Lab
Draper
555 Technology Square,
Cambridge, MA 02139
Phone:  617-258-3819
www.draper.com<http://www.draper.com/>



From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun
Sent: Thursday, July 26, 2018 12:51 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Experience on ICP-RIE

Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and  Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What's the pros and cons?  I would greatly appreciate for your feedback!

best,

Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/


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