[labnetwork] Burn-off arsenic using ALD

[Noah Clay]

Hi Aju,

If I’m not mistaken, you’ll need hydrogen to reduce As and make it volatile so it pumps more efficiently out of your system.  Perhaps it desorbs from the InP surface at 300C, but without promoting the gas phase, I think it will condense elsewhere in your ALD or pumping system.  

There are a number of wet chemical passivations for InP surfaces that are used for pre-ALD cleans.  If you’d like, please get in touch and I can share my experiences with you.

Best,
Noah

> On Mar 13, 2018, at 1:12 PM, Jugessur, Aju S <aju-jugessur at uiowa.edu> wrote:
> 
> Hi all,
> 
> I have a user who would like to use the ALD to burn off arsenic materia (2-3 microns) on their Indinium phosphide substrate, at 300 C. Pump the arsenic away and then ALD coat Al203.
> They do not want any oxidation of their samples after the removal of the arsenic, hence the suggested approach.
> 
> Can anyone please comment on this? Both from a health/safety and the technical approach. We have an Oxford Opal.
> 
> Thanks for your feedback.
> 
> Regards
> Aju
> 
>> Begin forwarded message:
>> 
>> From: "Zhang, Kailing" <kailing-zhang at uiowa.edu <mailto:kailing-zhang at uiowa.edu>>
>> Subject: questions about ALD
>> Date: March 13, 2018 at 11:35:51 AM CDT
>> To: "Jugessur, Aju S" <aju-jugessur at uiowa.edu <mailto:aju-jugessur at uiowa.edu>>
>> 
>> Hi Aju,
>> I have a question about 174 ALD system. We have a plan of depositing 2-3um of arsenic on our nanowire samples, then transfer them into ALD, heat them up to ~300C to burn off arsenic and let it get pumped out(by the pump on ALD), then depositing Al2O3 on nanowires. Please let me know what you think about this plan, if it is feasible. Thanks!
>> 
>> Kailing  
> 
> Aju Jugessur, Ph.D.
> Director, University of Iowa Microfabrication Facility (UIMF)
> Optical Science and Technology Center
> Professor Adjunct, Physics and Astronomy
> University of Iowa
> Office: IATL 202, Tel: 319-3532342
> Labs: IATL 170, 172, 174
> https://ostc.uiowa.edu/uimf <https://ostc.uiowa.edu/uimf>
> 
> 
> 
> 
> 
> 
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