[labnetwork] Standards for XPS

Deepalakshmi Putchen Dakshinamoorthy pddeepa at iisc.ac.in
Thu Mar 29 08:19:00 EDT 2018


Dear all,


We have Ultra Axis XPS and the standard we are using is Ag and Cu.


I would like to know what is the best standard for depth profiling

How to check whether the tool is fine at different modes (XPS, UPX, depth profiling, mapping)


Apreciate your valuable inputs


Dr Deepalakshmi PD

Technology Manager

Micro and Nano Characterisation Facility (MNCF)
Room No. GF-12
Centre for Nano Science and Engineering (CeNSE)
Indian Institute of Science (IISc)
Bengaluru-560 012, INDIA
T:  +91 80 2293 3181 (Ext:130)
M: +91-9886106429<tel:+91%2075501%2084746>
E: pddeepa at iisc.ac.in
W: www.mncf.cense.iisc.ac.in
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