[labnetwork] Standards for XPS

[Pilar Herrera-Fierro]

Hello,

It was common to use Ta oxide, that can be made electrochemically. Recipes
are in the web. It has the advantage that you can see the size of the
crater, so you can determine rates for different size areas. You can see
the oxygen (oxide) peak disappear in the profile, and it sputters easily.

Pilar

On Thu, Mar 29, 2018 at 8:19 AM, Deepalakshmi Putchen Dakshinamoorthy <
pddeepa at iisc.ac.in> wrote:

> Dear all,
>
>
> We have Ultra Axis XPS and the standard we are using is Ag and Cu.
>
>
> I would like to know what is the best standard for depth profiling
>
> How to check whether the tool is fine at different modes (XPS, UPX, depth
> profiling, mapping)
>
>
> Apreciate your valuable inputs
>
>
> Dr Deepalakshmi PD
>
> Technology Manager
>
> Micro and Nano Characterisation Facility (MNCF)
> Room No. GF-12
> Centre for Nano Science and Engineering (CeNSE)
> Indian Institute of Science (IISc)
> Bengaluru-560 012, INDIA
> T:  +91 80 2293 3181 <+91%2080%202293%203181> (Ext:130)
> M: +91-9886106429 <+91%2075501%2084746>
> E: pddeepa at iisc.ac.in
> W: www.mncf.cense.iisc.ac.in
>
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>
>


-- 
Pilar Herrera-Fierro, Ph.D.
LNF User Services Director
Lurie Nanofabrication Facility
University of Michigan

RM 1239 EECS Building
1301 Beal Ave.
Ann Arbor, MI 48109-2122

*Cell* 734 646 1399

(734) 646 1399

www.lnf.umich.edu
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