[labnetwork] HF Vapour Setup

[Fouad Karouta]

Thank you all for your input, it was very helpful!
Best regards,
Fouad Karouta

From: Michael Hume [mailto:michael.hume at ualberta.ca]
Sent: Wednesday, 23 May 2018 7:00 AM
To: Frank Dirne - TNW <F.W.A.Dirne at tudelft.nl>
Cc: Fouad Karouta <fouad.karouta at anu.edu.au>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] HF Vapour Setup

We also have a Vapour HF setup but it does not include an electrostatic chuck, the wafer is simply held in place by a set of drop in pins.

On Tue, May 22, 2018 at 1:04 AM, Frank Dirne - TNW <F.W.A.Dirne at tudelft.nl<mailto:F.W.A.Dirne at tudelft.nl>> wrote:
Idonus has a similar set-up.
Recently we had a failure in the electrostatic chuck and after returning it to Idonus we had a repaired chuck within 7 working days.


best regards / met vriendelijke groeten,
Frank Dirne

Managing Director Kavli Nanolab
Delft University of Technology
Lorentzweg 1, 2628 CJ Delft
TNW (bldg 22) - room D121
Phone: +31 (0)15 27 82357 / +31 614330507
email: F.W.A.Dirne at tudelft.nl<mailto:F.W.A.Dirne at tudelft.nl>

secretary: +31 (0)15 27 82898
website: www.qn.tudelft.nl/KN<http://www.qn.tudelft.nl/KN>

[cid:BE01F5A2-838B-40F8-A7BA-0A109001FFB3]

Fank Dirne

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>] On Behalf Of Fouad Karouta
Sent: maandag 21 mei 2018 5:00
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] HF Vapour Setup

Dear all,

We have an AMMT HF vapour setup for up to 4 “ wafer size.
Recently we are experiencing problems not being able to apply a voltage on the electro-static chuck to hold the wafer. We tried to contact AMMT in Germany (2 emails and 3 phone calls talking with an administrator) but we never got any feedback/reply from an engineer.

Has anyone experience with HF vapour setup? I wonder if someone has established contacts with someone from AMMT.
Also has anyone good experience with other possible suppliers of HF vapour setup?

Thank you,
Fouad Karouta

*************************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 2601, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/


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--

-Michael.



PLEASE NOTE MY PHONE NUMBER HAS CHANGED: 780-953-5081



Michael Hume

Operations Manager

University of Alberta - nanoFAB

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Edmonton, Alberta

Canada T6G 2V4
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