[labnetwork] Phosphorous doping methods

[Eichfeld, Chad Matthew]

Hi Iulian,
At PSU we used POCl3 for the lab class here for years in another cleanroom.  A few years ago something went wrong and the whole class was possibly exposed to the POCl3 so they came to us looking for alternatives. In our lab we used the solid source and were able to reproduce the results of the POCl3 based doping.  I see no disadvantages to the solids sources in a research lab like ours.

Thanks,
Chad Eichfeld 
Director of Operations
PSU Nanofab

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Friday, September 14, 2018 11:25 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Phosphorous doping methods

Dear All,

I am working on providing phosphorous doping capability at a tube furnace that will be used for fabrication classes (the first class will make a solar cell).

My research to date uncovered POCl3 and solid sources as possible methods for P diffusion. As expected, each seems to come with benefits and drawbacks.

I am hoping that you are willing to share your experience/advcie with me and/or the group so I can make a quick and smart decision.

Thank you very much,

Iulian

--
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
163 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
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