[labnetwork] Phosphorous doping methods

[Carsen Kline]

Hi Iulian,

This is incredible timing because as I write, our furnace tech is taking apart our POCl3 tube, which is to be decommissioned for good. It's had a long run and seen many great wafers, but we don't have enough volume to justify 1) the expense of keeping POCL on hand, 2) the resources used (N2 flow in idle), and 3) upkeep on the tube, which includes cleaning up the drips of phosphoric acid and clumps of sticky crud that accumulate. It creates quite a mess and is a hazard to the tubes below.

Unless you see high volume in your future, my advice would be to find a friend who already does it well.

Best,

Carsen (Stanford)

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu
Sent: Friday, September 14, 2018 8:25 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Phosphorous doping methods

Dear All,

I am working on providing phosphorous doping capability at a tube furnace that will be used for fabrication classes (the first class will make a solar cell).

My research to date uncovered POCl3 and solid sources as possible methods for P diffusion. As expected, each seems to come with benefits and drawbacks.

I am hoping that you are willing to share your experience/advcie with me and/or the group so I can make a quick and smart decision.

Thank you very much,

Iulian

--
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
163 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu


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