[labnetwork] ITO deposition

Iulian Codreanu codreanu at udel.edu
Tue Apr 9 12:54:51 EDT 2019


Dear Colleagues,

We have received a number of requests to provide ITO deposition 
capabilities. We have a sputterer but are concerned with the low melting 
points for Indium and Tin.  I am under the impression that ITO needs a 
dedicated deposition system. What is your experience/advice?

Thank you,

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu




More information about the labnetwork mailing list