[labnetwork] Sputter Fe

[Morrison, Richard H., Jr]

Here at Draper we tried EBEAM evaporation  and RF sputter, DC mag sputter will not work because Fe is magnetic.  It was not too bad on the tools, we did not notice any rust issues.

Rick


-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chang, Long
Sent: Thursday, February 21, 2019 2:39 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sputter Fe

Hi All,

I have a user who's wants to sputter Fe in our UHV sputtering system. My director is worried about rust forming. Anyone have adverse experience with Fe I should consider before allowing its usage?

Thanks,
Long
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