[labnetwork] Failure light on Turbotronik NT20

[Eric Lim]

Hi Kevin,
I have a manual for the NT340 controller, and in the troubleshooting 
section it says that if the Failure LED is on, one of the LEDs in the 
chain will be flashing to indicate the error. In this case it looks like 
LED6 is on, which points to a problem with the turbo temp being too 
high.  Not sure if this is the same for the NT20.  Maybe a failure of 
the temperature switch?
When you press the stop button are you in local mode? If the controller 
is in remote mode, you may need to send the stop command through the 
software.

Eric Lim

tel.617-253-6897
fax.617-258-8500
room 39-215

On 7/2/2019 10:50 PM, Kevin M McPeak wrote:
> Dear Colleagues,
>
> The turbo pump controller (Leybold Turbotronik NT20)  on our Oxford ICP100 plasma etching tool is giving a Failure light, see attached image. I looked in the manual but all it mentions is pressing the stop button to clear the error. I tried that but the light stays red. I have also tried power cycling the machine (didn't help) and I checked all the fuses (all good there). I also reached out the Oxford and Leybold. Oxford said that it is very old and that they have limited experience. Leybold has not replied.
>
> Does anyone on the list have experience with troubleshooting this turbo pump controller? The turbo pump itself is a Leybold 361C. I welcome tips on how best to troubleshoot this issue.
>
> Regards,
> Kevin
>
> --
> Kevin M. McPeak
> Assistant Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
>
>
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