[labnetwork] Dicing GaAs wafers

[Youry Borisenkov]

Hi,
Agree with Fouad. You need to treat the water. Disco have solutions for
that. But it will not be cheap and will involve potential health hazard
(for the person in charge) because of the Arsenic.
Regards,
Youry

On Thu, Jul 4, 2019 at 9:15 AM Fouad Karouta <fouad.karouta at anu.edu.au>
wrote:

> Dear John,
>
>
>
> For dicing III-V semiconductors you need to filter out the saw residues to
> avoid sending to the drain any As, P or Sb containing elements.
>
> Probably you can talk with your dicer supplier about options.
>
>
>
> Regards,
>
> Fouad Karouta
>
>
>
> *************************************
>
> Manager ANFF ACT Node
>
> Australian National Fabrication Facility
>
> Research School of Physics and Engineering
>
> L. Huxley Building (#56), Mills Road
> <https://www.google.com/maps/search/56),+Mills+Road?entry=gmail&source=g>,
> Room 4.02
>
> Australian National University
>
> ACT 2601, Canberra, Australia
>
> Tel: + 61 2 6125 7174
>
> Mob: + 61 451 046 412
>
> Email: fouad.karouta at anu.edu.au
>
> http://anff-act.anu.edu.au/
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Nibarger, John (Fed)
> *Sent:* Thursday, 4 July 2019 7:22 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Dicing GaAs wafers
>
>
>
> Dear Colleagues,
>
> We have some users who would like to use a dicing saw that is currently
> used to cut glass and sapphire to cut GaAs wafers as well. We’re worried
> about the safety aspects of both tool contamination and dealing with the
> waste water effluent. The dicing saw that we are using is a DISCO DAD3220.
> Does anyone have any thoughts or experience on this?
>
> Thanks,
>
> John
>
>
>
> John P. Nibarger, Ph.D.
>
> Manager, Boulder Micro-fabrication Facility
>
> Microfabrication Group Leader (687.10)
>
> National Institute of Standards and Technology
>
> 325 Broadway, MS 687.10
>
> Boulder, CO  80305
>
> 303-497-4575 (phone)
>
> 303-497-3042 (fax)
>
> john.nibarger at nist.gov
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20190704/d9aa16b8/attachment.html>