[labnetwork] Cassette Loading Spinner/Developer Tools

Tue Jun 18 20:34:31 EDT 2019

Hi Shawn,
We (MTL) bought a coater/developer unit from PicoTrack a couple of years ago and have been very happy with the system.  Its features were comparable to the Suss cluster tool.  They have a highly customizable interface, easy to use software and great support.  If I remember correctly PicoTrack was founded by former SVG engineers.  I'm happy to answer any specific questions you might have on the system, just send me an email or give me a call offline.

Kris

Kristofor Payer
MIT.nano
Massachusetts Institute of Technology
60 Vassar Street
12-4011
Cambridge, MA 02139
617-324-1469
kpayer at mit.edu

On 6/18/19, 8:18 PM, "labnetwork-bounces at mtl.mit.edu on behalf of Shawn Wright" <labnetwork-bounces at mtl.mit.edu on behalf of wrightsh at lnf.umich.edu> wrote:

    Hi Everyone,

    We’re currently looking at replacing our SUSS ACS200 cluster tool, it’s showing it’s age and SUSS no longer supports it for replacement parts.  It would be good to hear what people are running for automated spin coating and developing, especially any experience with reliability and vendor support.  Specifically we’re looking for tools that can do cassette loading for 4” and 6” wafers that can do vapor prime, photoresist spinning, bake, and aqueous develop.

    Thanks for your help,
    Shawn Wright
    Lead Engineer in Research
    Lurie Nanofabrication Facility
    University of Michigan
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