[labnetwork] Gorilla glass Etching

[Adrián César Cavazos Sepúlveda]

Hi Christophe,
To check for the composition, you can use an SEM with EDX/EDS. If sodium
and potassium X-contamination is not a problem, and the glass is mainly
Al2O3-SiO2, you could use preexisting etch recipes or a mixture of them
(e.g. CHF3/Ar in 4:1) .

Bests,
Adrián Cavazos Sepúlveda



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Am Do., 7. März 2019 um 18:49 Uhr schrieb Christophe Clément <
christophe.clement at polymtl.ca>:

> Hello Labnetwork community,
> I've been ask by a company to etch Gorilla Glass in our DRIE-ICP etcher
> (Oxford Plasmalab 100), where we already etch Si (regular Bosch process)
> and SiO2 etching (Fused silica only). As the supplier of the Gorilla glass
> does not share the composition of this kind of glass, I'm a little bit
> afraid of cross contamination (Potassium and other material that can be
> present in the glass) that can be found during Si etching for example.
> Is there anyone who has experienced etching this material? If yes, what is
> your cleaning procedure after etching Gorilla glass?
>
> Thank you in advance for your answer
> Best
> Christophe
>
> *Christophe Clément*
>
> *Technicien laboratoire*
>
> Laboratoire de microfabrication (LMF)
>
> Groupe des Couches Minces (GCM) *www.gcmlab.ca <http://www.gcmlab.ca>*
>
> Ecole Polytechnique de Montréal www.polymtl.ca
>
> Département de génie physique
>
> * 2900 Boulevard Edouard Monpetit
>
> Pavillon JAB
> Campus de l'Université de Montréal
> Montréal (Québec) H3T 1J4
>
>
> 8 christophe.clement at polymtl.ca
>
> ( 514 340 4711
>
> Fax : 514 340 4711 # 2417
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