[labnetwork] gas installation

[Paolini, Steven]

Christian,

  You can use single stage regulators for this. Please see me the next time you are at Harvard and I will explain how to set this up.

    Steve  Paolini


________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Christian Pfluegl <pfluegl at pendar.tech>
Sent: Wednesday, May 1, 2019 11:27 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] gas installation


Hi all,



We are installing a RIE system with the following gases: CF4, O2, Ar.

I was hoping to get some advice on the gas panels for those gases. We are planning on only buying single-stage regulators for all the gas lines.

Are single stage regulators sufficient for this or do you recommend to add purge circuits or other features to avoid contamination of the gas lines during maintenance (e.g. cylinder exchange).



Thanks,



Christian



Dr. Christian Pfluegl

Pendar Technologies LLC

tel.: (857) 413-9339

www.pendartechnologies.com<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.pendartechnologies.com_&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=qbvYD5vjciEUfSff_xbrCFv8vM0-4l9C-NDweGBOTWc&s=N-2e0C8z-_UbvZLJuhxImlv1LpVNrQV9YzrjV1Z8SbI&e=>



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