[labnetwork] Tencor P2 profiler calibration

Wed May 15 13:22:14 EDT 2019

Hello all,

Does anyone have the manual for step height calibration for the Tencor P2 contact profiler? We tried contacting KLA Tencor tech support, so far they have only been able to provide us the instructions for Step width calibration.

Any help will be greatly appreciated!

Greshma
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Greshma Nair, Ph.D.
Cleanroom Manager
Nanofabrication Facility (NFF)
Center for Advanced Microstructures and Devices (CAMD)
6980 Jefferson Highway
Baton Rouge, LA  70806
Phone: (225) 578-9378
lsu.edu/nanofabrication<http://lsu.edu/nanofabrication>

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