[labnetwork] Backing Vacuum Pump - Dry pumps vs Oil Pumps

[April, Mark R.]

Good Morning
I only use Dry pumps in my clean room at    Draper.
I removed all of the oil pumps several years ago
Thanks

Mark R. April
[https://intranet.draper.com/pcweb/media/branding/images/logo_styles/color_logo.jpg]
Senior  Equipment Engineer
Microfabrication Laboratory Lead
555 Technology Square
Cambridge, MA  02139
mapril at draper.com<mailto:mapril at draper.com>
O # 617-258-1613 C # 617-455-1596
www.draper.com<http://www.draper.com/>



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Pradeep Nyaupane
Sent: Sunday, November 3, 2019 8:21 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Backing Vacuum Pump - Dry pumps vs Oil Pumps

Dear All,

 We have been using Dry pumps for turbo pump backing for Sputters, E-beam evaporators. And are planning to swap to oil pump with an anti-suck back valve, whenever required (in case dry pumps go bad).

We would like to know whether any of you are using oil pumps are being used as backing pump for Turbo / Cryo / DP.

Any advice / suggestions would be greatly appreciated.

Thank You in advance.

Thanks & Regards,
Pradeep Nyaupane

Technical Superintendent,
Equipment Maintenance Team In-charge,
IITBNF, Electrical Engg Dept
IIT Bombay, India
Tel No. 02225764471(O)
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