[labnetwork] Bulkhead between cleanroom and regular service room

Wang, Lei lei.z.wang at yale.edu
Fri Nov 8 18:33:21 EST 2019


Hi Steven,

Thank you very much for your reply. It will be a traditional sidewinder style. But the air will return to the pre-filters via closed pipe lines, without passing into the service chase. So our cleanroom and service room are isolated.

Have a great weekend.

Best
Lei
________________________________
From: Paolini, Steven <spaolini at cns.fas.harvard.edu>
Sent: Friday, November 8, 2019 5:56 PM
To: Wang, Lei <lei.z.wang at yale.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: RE: Bulkhead between cleanroom and regular service room


Lei,

  I need to know a few things before answering;  Is your clean room a ballroom style with raised floors or is it a traditional “sidewinder” style where the return air passes into the chases and back up to the pre-filters?



Steve Paolini

Principal Equipment Engineer

Harvard University Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA 02138

617- 496- 9816

spaolini at cns.fas.harvard.edu

www.cns.fas.harvard.edu



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Wang, Lei
Sent: Friday, November 08, 2019 2:20 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Bulkhead between cleanroom and regular service room



Dear Colleagues,



We are working on cleanroom expansion, but might with a regular service room. Does anyone have experience with bulkhead method between cleanroom and 'dirty' service room?



The front of our new e beam evaporator will sit in cleanroom, but the back might be in a regular service room. Anyone knows is there any issue for this wall mount method? Do we need to seal all the gaps to avoid the contamination coming from the service room? Is the vibration a big problem when the system is running?



All suggestions and comments are welcome.

Thank you so much.



Lei



Lei Wang, Ph.D.

Yale West Campus Cleanroom

750 West Campus Drive

West Haven, CT, 06516

lei.z.wang at yale.edu<mailto:lei.z.wang at yale.edu>

203-737-6579


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