[labnetwork] Bulkhead between cleanroom and regular service room

[April, Mark R.]

HI Lei
Here at Draper we have a traditional "sidewinder" style clean room.  A large majority of our tools are bulkhead mounted, with very slight air gaps between the tool and wall. Of course the rooms were balanced with this in mind.  We have not had any particle issues and can maintain class 100 and 1000 in those areas.  All of our pumps ,chillers , critical alignment tools are on vibration isolation pads that really helped out tremendously.  I found them at isolateit.com    there are different types.
Thanks

Mark R. April
[https://intranet.draper.com/pcweb/media/branding/images/logo_styles/color_logo.jpg]
Senior  Equipment Engineer
Microfabrication Laboratory Lead
555 Technology Square
Cambridge, MA  02139
mapril at draper.com<mailto:mapril at draper.com>
O # 617-258-1613 C # 617-455-1596
www.draper.com<http://www.draper.com/>



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Paolini, Steven
Sent: Friday, November 8, 2019 5:57 PM
To: Wang, Lei <lei.z.wang at yale.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Bulkhead between cleanroom and regular service room

Lei,
  I need to know a few things before answering;  Is your clean room a ballroom style with raised floors or is it a traditional "sidewinder" style where the return air passes into the chases and back up to the pre-filters?

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Wang, Lei
Sent: Friday, November 08, 2019 2:20 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Bulkhead between cleanroom and regular service room

Dear Colleagues,

We are working on cleanroom expansion, but might with a regular service room. Does anyone have experience with bulkhead method between cleanroom and 'dirty' service room?

The front of our new e beam evaporator will sit in cleanroom, but the back might be in a regular service room. Anyone knows is there any issue for this wall mount method? Do we need to seal all the gaps to avoid the contamination coming from the service room? Is the vibration a big problem when the system is running?

All suggestions and comments are welcome.
Thank you so much.

Lei

Lei Wang, Ph.D.
Yale West Campus Cleanroom
750 West Campus Drive
West Haven, CT, 06516
lei.z.wang at yale.edu<mailto:lei.z.wang at yale.edu>
203-737-6579

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