[labnetwork] RIE Process Gases

[Cenk Yanik (Alumni)]

Dear All,
We are wondering how often do you change the RIE process gases even the
gases are not run out. We have been told that they should be changed in max
3 years even if they are almost full but we have been using some of them
(SF6, C4F8, CHF3)  for 5 years and we didn't realize any process-related
critical problems during the dry etching process.
Have you ever faced with any problems for Fluorine and Chlorine based gases
in your institutes?
We would appreciate if you could share your experiences and regulations
considering the shell life of the process gases at your facilities
Best Regards,

-- 

Cenk YANIK, PhD
Nanofabrication Team Leader

Sabanci University
Nanotechnology Research and Application Center ( SUNUM )
Orta Mahalle, Üniversite Caddesi No: 27 34956 Tuzla - İstanbul
Office:+90 216 483 9994
web: sunum.sabanciuniv.edu
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