[labnetwork] RIE Process Gases

[Cenk Yanik (Alumni)]

Dear Richard,
Thank you for the information.
We follow the same procedure as you mentioned: " keeping them on a scale"
and order the new one when the weight drops under the threshold value but
for some of them it takes a few years depending on the usage.


Morrison, Richard H., Jr <rmorrison at draper.com>, 9 Eki 2019 Çar, 16:08
tarihinde şunu yazdı:

> Hi,
>
>
>
> Here at Draper we only change the gases when they are “empty”, by that I
> mean we set a bottom limit for liquids by keeping them on a scale. For true
> gases we send the bottle back empty if we can. Some time there is just not
> enough gas left in the bottle to finish a day so we would change it early.
>
>
>
> We keep a log of all weights and pressures so we can monitor and try to
> estimate when it would need to be changed so that we have a spare on hand.
>
>
>
> Rick
>
>
>
>
>
> Richard H. Morrison
>
> Principal Member of the Technical Staff
>
> Draper
>
> 555 Technology Square
>
> Cambridge, MA
>
> 02139-3573
>
>
>
> Work  617-258-3420
>
> Cell  508-930-3461
>
> www.draper.com
>
>
>
>
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Cenk Yanik (Alumni)
> *Sent:* Wednesday, October 09, 2019 2:59 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] RIE Process Gases
>
>
>
> Dear All,
>
> We are wondering how often do you change the RIE process gases even the
> gases are not run out. We have been told that they should be changed in max
> 3 years even if they are almost full but we have been using some of them
> (SF6, C4F8, CHF3)  for 5 years and we didn't realize any process-related
> critical problems during the dry etching process.
>
> Have you ever faced with any problems for Fluorine and Chlorine based
> gases in your institutes?
>
> We would appreciate if you could share your experiences and regulations
> considering the shell life of the process gases at your facilities
>
> Best Regards,
>
>
>
> --
>
>
> Cenk YANIK, PhD
>
> Nanofabrication Team Leader
>
> Sabanci University
> Nanotechnology Research and Application Center ( SUNUM )
> Orta Mahalle, Üniversite Caddesi No: 27 34956 Tuzla - İstanbul
> Office:+90 216 483 9994
> web: sunum.sabanciuniv.edu
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-- 

Cenk YANIK, PhD
Nanofabrication Team Leader

Sabanci University
Nanotechnology Research and Application Center ( SUNUM )
Orta Mahalle, Üniversite Caddesi No: 27 34956 Tuzla - İstanbul
Office:+90 216 483 9994
web: sunum.sabanciuniv.edu
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