[labnetwork] RIE Process Gases

[Leif Steen Johansen]

Hello Cenk,

We change our SF6 and C4F8 every year because the bottles have been emptied. However, we have had the same CHF3 bottle for over seven years without any known problem.

Best regards,
Leif


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Leif Steen Johansen

Head of Operations, Ph.D.



Dir. +45 45 25 57 13

Mob. +45 25 34 89 92

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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Cenk Yanik (Alumni)
Sent: 9. oktober 2019 08:59
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] RIE Process Gases

Dear All,
We are wondering how often do you change the RIE process gases even the gases are not run out. We have been told that they should be changed in max 3 years even if they are almost full but we have been using some of them (SF6, C4F8, CHF3)  for 5 years and we didn't realize any process-related critical problems during the dry etching process.
Have you ever faced with any problems for Fluorine and Chlorine based gases in your institutes?
We would appreciate if you could share your experiences and regulations considering the shell life of the process gases at your facilities
Best Regards,

--

Cenk YANIK, PhD
Nanofabrication Team Leader
Sabanci University
Nanotechnology Research and Application Center ( SUNUM )
Orta Mahalle, Üniversite Caddesi No: 27 34956 Tuzla - İstanbul
Office:+90 216 483 9994
web: sunum.sabanciuniv.edu<http://sunum.sabanciuniv.edu>
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