[labnetwork] HSQ Price Increase

[Aaron Hryciw]

Hi all,

Because of ongoing lead time and shelf life issues with Dow Corning HSQ,
our centre switched to stocking AQM SiOx
<https://www.aqmaterials.com/aqm-silsesquioxane-polymers> from Applied
Quantum Materials <https://www.aqmaterials.com/>, which is, as far as I
understand, chemically identical to standard HSQ.  We purchase it in powder
form, where it is reputed to have an indefinite shelf life if kept
moisture-free; users mix it with anhydrous MIBK to the concentration they
need, as needed.

We have a news post
<https://www.nanofab.ualberta.ca/2017/news/new-negative-tone-ebl-resist-in-stock-aqm-siox/>
about
AQM SiOx, including some links to process results and other documentation.
In a side-by-side comparison with Dow Corning HSQ, its behaviour as an EBL
resist was essentially the same.  Our staff have not tested its performance
as an etch mask, but anecdotally, I have heard from some of our EBL users
that it behaves the same as standard HSQ for chlorine-based ICPRIE of Si
(e.g., for Si photonics).

(As a side note, Applied Quantum Materials is a spin-off company from our
university's chemistry department, but they are not associated with our
centre in any way.)

Cheers,

 – Aaron




Aaron Hryciw, PhD, PEng

Fabrication Group Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 780-940-7938
www.nanofab.ualberta.ca



On Wed, Sep 18, 2019 at 10:00 AM Michael Rooks <michael.rooks at yale.edu>
wrote:

> You'll be lucky to get any HSQ at all. Ordering HSQ has gotten pretty bad.
> I made an order in June, and by this month only half of it arrived.
> And Dow (now "DDP") got the address wrong again.
>
> --------------------------------
> Michael Rooks
> Yale Institute of Nanoscience and Quantum Engineering
> nano.yale.edu
>
>
>
> On 09/17/2019 02:26 PM, N Shane Patrick wrote:
>
> Hello all,
>
> I’ve been informed by Krayden that as of September 11 the price of HSQ
> (XR-1541-006, 125mL) has increased to $1801.43, which represents a massive
> increase from my order back in July. I don’t know the reasons, but thought
> people might want to be aware. Lead times continue to be 12 weeks or more.
>
> N. Shane Patrick
> Direct Write and Stepper Lithography
> Research Engineer, Washington Nanofabrication Facility (WNF)
> National Nanotechnology Coordinated Infrastructure (NNCI)
> University of Washington
> Fluke Hall 129, Box 352143
> (206) 221-1045
> patricns at uw.edu
> http://www.wnf.washington.edu/
>
>
>
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