[labnetwork] Porous Silicon Etch Wet Bench

[Aebersold,Julia W.]

I've made porous silicon at our electroplating bench.  No need to install a new bench.  Just make sure it can handle 49% HF.


Cheers!


Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


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From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Ferraguto, Thomas S <Thomas_Ferraguto at uml.edu>
Sent: Thursday, December 3, 2020 12:36 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Porous Silicon Etch Wet Bench


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Colleagues,



Does anyone have a “Porous Silicon Wet Bench Station”? for either foundry or self-use?



I have a customer that wanted to place a “Porous Silicon Etching” wet bench in my clean room.



I don’t have the room and the engineering  cost alone for the install makes in prohibitive.



Please let me know if you know any availability of such a system.



Best Regards





Thomas S. Ferraguto

Saab ETIC Nanofabrication Laboratory Director

Saab ETIC Building Director

1 University Avenue

Lowell MA 01854

Mobile 617-755-0910

Land 978-934-1809

Fax 978-934-1014








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