[labnetwork] Sloped Sidewalls for Photoresist

[Mario Portillo]

Sa'ad,...... here is my two cents......SPR-955 is a high thruput I-line photo resist (365nm) for optimum results you want to a match a lithography tool that has I-line exposing light source, G-line 436nm or H-line 405 nm do not give you optimum results in many cases if used with a none matched resist,, also the SPR is tailored to be processed with wet chemistry. Photo resists are usually tailored for best results to be processed with wet or dry chemistry.
I hope this helps, Regards.


Mario A. Portillo Sr.
HIGH'born Technology USA Inc..
Semiconductor Equipment Services
8130 Glades Road, #229
Boca Raton, FL 33434
561 470-1975 office
561 504-0244 cell
hbtusainc at yahoo.com
www.hbtusainc.com 

    On Monday, December 21, 2020, 09:13:53 AM GMT+8, Tony Whipple <whipp003 at umn.edu> wrote:  
 
 Hello Sa'ad;
As Robert said, using a stepper would be a large help. We have used SPR-955 before and was able to have nice vertical sidewalls at half micron lines, but was with a stepper.
One other item that we did was a post exposure bake, which was done between your steps 6 and 7.  If limited to a contact aligner, then hard or vacuum contact are worth 
trying if you have not already done that.
Good luck, Tony W.


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On Thu, Dec 17, 2020 at 12:56 PM Sa'ad H <saad_m_hassan at hotmail.com> wrote:

Good Morning Everyone,
I trust everyone is well. I have been working on defining lithographic features that are lines separated by trenches both of which are 800nm wide.

I am getting adequate resolution, i.e, the lines are very close to spec. But the sidewalls slope significantly as can be seen in the attached picture.
My wafer is fabricated as follows:   
   -  Bare Silicon Wafer
   - HMDS
   - Backside Antireflective Coating (XHiRC-16)
   - SPR-955 - 6000 rpm spin - PR thickness - 800nm
   - Bake 90 Celsius for 90 seconds   

   - Exposure - 125 mJ/cm2 in a contact aligner
   - Development 1 minute with ultrasonic






Does anyone know how I can achieve nice vertical sidewalls? 


Cheers,Sa'ad
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