[labnetwork] XeF2 supplier?

Tue Feb 4 12:44:29 EST 2020

Hmmm, we typically use Pelchem.

Cheers!

Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>

________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of John Nash <jcn8004 at rit.edu>
Sent: Tuesday, February 4, 2020 8:06 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] XeF2 supplier?

Does anyone know of a reliable supplier of XeF2? We have a Xactics XeF2 system that will be running out soon. I have reached out to Pelchem, Electronic fluorocarbons and Linde over the last 6 months and none are able to help. Thanks in advance for all recommendations.

Regards,

John C Nash

SMFL - Technician

Rochester Institute of Technology

Semiconductor & Microsystems Fabrication Laboratory

82 Lomb Memorial Dr.

Bldg. 17-2627

Rochester, NY 14623

585 478-3835 cell

john.nash at rit.edu<mailto:john.nash at rit.edu>

www.smfl.rit.edu<https://nam03.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.smfl.rit.edu%2F&data=02%7C01%7Cjulia.aebersold%40louisville.EDU%7Cb4a0acb66d3541e680c308d7a998115f%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637164342898114630&sdata=d5WibZ%2FbaVewTnyVopPhC0UUWg%2BmsBlB2rXThBgKHD8%3D&reserved=0>

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200204/705b513c/attachment.html>