[labnetwork] XeF2 supplier?

Jeremy Clark clark at cnf.cornell.edu
Tue Feb 4 13:16:11 EST 2020


Hi John,

We had the same issue dealing with Pelchem the last time around. We were 
able to make the purchase through Linde without issue- the division's 
email is:

ElectronicMaterials.ESG.us.lg at linde.com

Good luck,

Jeremy

On 2/4/20 8:06 AM, John Nash wrote:
>
> Does anyone know of a reliable supplier of XeF2? We have a Xactics 
> XeF2 system that will be running out soon. I have reached out to 
> Pelchem, Electronic fluorocarbons and Linde over the last 6 months and 
> none are able to help. Thanks in advance for all recommendations.
>
> Regards,
>
> John C Nash
>
> SMFL - Technician
>
> Rochester Institute of Technology
>
> Semiconductor & Microsystems Fabrication Laboratory
>
> 82 Lomb Memorial Dr.
>
> Bldg. 17-2627
>
> Rochester, NY 14623
>
> 585 478-3835 cell
>
> john.nash at rit.edu <mailto:john.nash at rit.edu>
>
> www.smfl.rit.edu <http://www.smfl.rit.edu>
>
>
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