[labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples

[Shepard, Jeremiah J]

Does anyone have experience etching Zinc Sulfide and Zinc Selenide?

It appears chemistry would involve BCL3.

My primary concern is chamber contamination, any experience or thoughts?  Thank you in advance!

Thank you,
Jerry Shepard
Research Engineer
Purdue University
Birck Nanotechnology Center

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