[labnetwork] KLA P7 profiler and Bruker DektakXT DXT-A

Edmond Chow kchow10 at gmail.com
Mon Feb 24 17:42:58 EST 2020


Hi,

We are trying to decide whether to purchase KLA P7  profiler or Bruker
Dektak DXT-A profiler.

We will appreciate your feedback if you have those systems in your lab.

Bruker system seems to slightly cheaper, but they limit to 55mm scan range,
I wonder how good is their stitching process if we need to scan 100mm wafer.

Thanks.

-- 
Edmond Chow
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