[labnetwork] KLA P7 profiler and Bruker DektakXT DXT-A

[Shimon Eliav]

Hi Edmond,
I passed for this purchase process some years ago. Then I decided for Bruker and we are really satisfied: the system is simple to use, robust and have nice automation features.
Regarding the stitching: it works just fine, also for long ranges also for 3D topography.
Regards,
Shimon
The Hebrew University of Jerusalem
The Unit for Nano Fabrication - UNF


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Edmond Chow
Sent: Tuesday, 25 February 2020 0:43
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] KLA P7 profiler and Bruker DektakXT DXT-A

Hi,

We are trying to decide whether to purchase KLA P7  profiler or Bruker Dektak DXT-A profiler.

We will appreciate your feedback if you have those systems in your lab.

Bruker system seems to slightly cheaper, but they limit to 55mm scan range, I wonder how good is their stitching process if we need to scan 100mm wafer.

Thanks.

--
Edmond Chow
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200225/87981991/attachment.html>