[labnetwork] liquefaction of O2 on MBE walls cooled with LN2

[Saba Sadeghi]

Dear all,


I have a question about MBE systems that are used for metal-oxide growth.

In our MBE system we use oxygen flow rate of 0.3 - 0.4 sccm, which leaves the chamber pressure at about 1E-5 Torr.

The chamber incorporated LN2 cooling shrouds.  My question is that do you think that there is any concern regrading liquefaction of oxygen on the chamber's wall, that might end up dripping down the walls, evaporating and causing a pressure burst.


I have not encountered the problem yet, but I was wondering if over time, and for long growth time this might become an issue. Has anyone encountered this issue before?


Any input is much appreciated,


Best,

--

Saba Sadeghi, PhD
Quantum Devices Fabrication Scientist
Institute for Quantum Computing, University of Waterloo
Email: saba.sadeghi at uwaterloo.ca<mailto:saba.sadeghi at uwaterloo.ca>

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