[labnetwork] SPTS DRIE Question

[bob.henderson at etchedintimeinc.com]

I know a number of you have SPTS DRIE systems and I would like to ask what
hardware configuration is necessary to prevent undercut (Footing) at the
sacrificial stop layer at completion of etch. I have been told that it
requires a different frequency generator than 13.56 MHz used for the bulk
etch. Do the newer tools also have some method of endpoint on the stop layer
or is it just a timed etch? Your help is appreciated

 

Bob Henderson

Etched In Time, Inc

941 S. Park Lane

Tempe, Arizona 85281

Phone: 602-206-6154

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