[labnetwork] SCS Labcoater 2 parylene system

[Hayes, Matthew David]

Hello all!

I'm interested in hearing how others are cleaning the chambers in these systems. Including:


  1.  Cleaning after every run or at some interval?
  2.  Procedures used to clean?
  3.  Using Micro 90 on chamber surfaces to promote removal of parylene film?

Also, some users will get a cloudy film. Could this be from too thick of coating of Micro 90? Usually, I'll check vacuum then run a deposition of my own and the film looks better than the users.

Matthew D Hayes
Engineering Technician
Birck Nanotechnology Center
Purdue University
765-494-6522
hayes186 at purdue.edu<mailto:hayes186 at purdue.edu>

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