[labnetwork] Savannah ALD GUI crash - empties the N2 cylinder

Youry Borisenkov yb2471 at columbia.edu
Tue Jan 28 16:53:26 EST 2020


Hi Tony,
We are on LabView V8.0; and the Savannah ALD software is V18-24.vi
The situation I described, it indeed different.
As a matter of fact, I got a response from Veeco representative and I hope
he will be able to provide valuable input.

Thank you and have a great week!
Best regards,
Youry

On Tue, Jan 28, 2020 at 9:35 AM Hathaway, Malcolm R <
hathaway at cns.fas.harvard.edu> wrote:

> Hi Youry,
>
> I have not come across that particular issue so far.  Typically, when the
> GUI freezes (USB errors in our case) my sense has been that everything
> stops in a "fail-safe" mode, i.e. heaters off, and everything else with
> them.
>
> I have been dealing with a fault in our controller lately, wherein the MFC
> circuit does not enter "bypass" when venting, instead shutting off, and
> preventing venting.  This is a different issue, however, in that it is
> hardware related.  Yours sounds like it's control signal-related.  Perhaps
> a soft-ware reload?  Or update?  Which rev. of Savannah software do you
> have?
>
>
> Mac
> Harvard CNS
> ------------------------------
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>
> on behalf of Youry Borisenkov <yb2471 at columbia.edu>
> *Sent:* Monday, January 27, 2020 4:13 PM
> *To:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder
>
> Dear All,
> We are experiencing a strange fault with our savannah ALD.
> It was hard to catch but, when the Lab View GUI crashes or friezes (this
> happens every once in a while and the system is in Idle mode), it just sets
> the Nitrogen purge MFC to the max open position and empties the N2 cylinder
> unless we are fast to respond.
> Did any of you had such a problem? If so, what was the solution?
>
> --
> Thanks and Best Regards,
> Youry Borisenkov
> Cleanroom Process Engineer
> Columbia University
> 530 W 120th Street Room 1017
> New York, NY 10027
> *Columbia Nano Initiative | Cleanroom
> <https://urldefense.proofpoint.com/v2/url?u=http-3A__cni.columbia.edu_columbia-2Duniversity-2Dclean-2Droom&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=m_0M5aEvuhPmDFEcFpwAUsH1CTe4zveQpyoppGDAcz4&s=RK1NDmOxYEyXG2eybL2Qpk2_W_6lMNLAqNPOt3ieCSM&e=>*
>
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