[labnetwork] Savannah ALD GUI crash - empties the N2 cylinder

[Eric Deguns]

Dear Youry,

I'm one of the original folks from Cambridge Nanotech.  I (along with the
rest of the Cambridge NanoTech ALD group) am/arewith Veeco and we are still
supporting these tools.

We haven't seen the situation you describe (with the MFC failing open) with
over 400 installed Savannahs.  Indeed the safety concepts for the system
are supposed to prevent this.  A few years back I recall that Columbia had
their MFC reworked/refurbished via a third party. I'm wondering if this is
the root cause of the situation that you describe - there is some subtle
differences between the vent/fast-vent of the MFCs.

Please feel free to contact me directly at edeguns at veeco.com or my
colleagues at ALDsupport at veeco.com and we can try and help you as best we
can.

Many thanks in advance,

Eric

On Mon, Jan 27, 2020 at 8:08 PM Youry Borisenkov <yb2471 at columbia.edu>
wrote:

> Dear All,
> We are experiencing a strange fault with our savannah ALD.
> It was hard to catch but, when the Lab View GUI crashes or friezes (this
> happens every once in a while and the system is in Idle mode), it just sets
> the Nitrogen purge MFC to the max open position and empties the N2 cylinder
> unless we are fast to respond.
> Did any of you had such a problem? If so, what was the solution?
>
> --
> Thanks and Best Regards,
> Youry Borisenkov
> Cleanroom Process Engineer
> Columbia University
> 530 W 120th Street Room 1017
> New York, NY 10027
> *Columbia Nano Initiative | Cleanroom*
> <http://cni.columbia.edu/columbia-university-clean-room>
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>
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