[labnetwork] Sputtering of MgF2

[Tim Gilheart]

We also had a user depositing MgF2 routinely in our e-beam evaporator. Before letting them use this material, we completed a safety/process review together and confirmed that we didn’t anticipate any problems.

It did not subsequently create any special issues for us on our general purpose tool, which routinely supports dielectric and magnetic materials.

No idea about sputtering it; you may also want to consult your tool vendor in case they have a process expert who can help you.

Best of luck,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu

> On Jun 8, 2020, at 4:55 PM, Aebersold,Julia W. <julia.aebersold at louisville.edu> wrote:
> 
> Hi there!  Its been so long ago that I don't recall the details, but we have not had any issues with our e-beam system since then.
> 
> Cheers!
> 
> Julia Aebersold, Ph.D.
> Manager, Micro/Nano Technology Center
> University of Louisville
> 2210 South Brook Street
> Shumaker Research Building, Room 233
> Louisville, KY  40292
> (502) 852-1572
> http://louisville.edu/micronano/ <http://louisville.edu/micronano>
> 
> From: Football <yaofootball at gmail.com <mailto:yaofootball at gmail.com>>
> Sent: Monday, June 8, 2020 5:03 PM
> To: Aebersold,Julia W. <julia.aebersold at louisville.edu <mailto:julia.aebersold at louisville.edu>>
> Cc: labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>>
> Subject: Re: [labnetwork] Sputtering of MgF2
>  
> CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.
> I have the same question.  I don't know if there are compatibility problems with other elements (mostly are metals in our sputter system).  Does it cause hard-to-clean contaminations to the chamber, like small flakes, or problems to the vacuum quality of the chamber? Does it have special handling requirements? Any advice is greatly appreciated. Thanks and stay healthy.
> 
> 
> Fubo Rao, Ph.D. 
> Materials Research Laboratory
> The Grainger College of Engineering
> University of Illinois at Urbana-Champaign
> 104 S. Goodwin Ave. Urbana, IL 61801
> Office: 217-244-6202
> Email: frao at illinois.edu
>  <mailto:frao at illinois.edu%0b>
> 
> On Thu, Jun 8, 2017 at 2:51 PM <julia.aebersold at louisville.edu <mailto:julia.aebersold at louisville.edu>> wrote:
> I have a client that wants to sputter MgF2 in our processing chamber.  We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.
> 
> Cheers!
> 
> Julia Aebersold, Ph.D.
> MNTC Cleanroom Manager
> University of Louisville
> 2210 South Brook Street
> Shumaker Research Building, Room 233
> Louisville, KY  40292
> (502) 852-1572
> http://louisville.edu/micronano/ <http://louisville.edu/micronano>
> 
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