[labnetwork] Angstrom Engineering

[Youry Borisenkov]

Dear Neal,
We have 2 angstrom tools in our cleanroom
http://cni.columbia.edu/equipment-list
1. I’m not sure about the chamber type, I was not present during the
purchasing process. One of the tools has e-beam, sputter, thermal and
plasma pre-deposition clean capabilities. The other is a low (10^-9 torr)
vacuum e-beam. Both are used for liftoff including pmma. We did have few
issues of pmma blistering during Pt deposition but it was resolved after
adjusting the beam sweep parameters.
2. The customer service is excellent. Very responsive and helpful.
3. Both of our tools have different GUIs (one is newer than the other) but
both do a great job. Most users don’t even look into the chamber during
deposition and I can not recall the last time we had a problem. We do have
a procedure of weekly chamber maintenance where the crucibles are checked
and filled.

Best,
Youry

On Thu, Mar 19, 2020 at 4:18 PM NEAL, ADAM T DR-02 USAF AFMC AFRL/RXAN <
adam.neal.3 at us.af.mil> wrote:

> Labnetwork,
>
>
>
> My organization is considering purchase of a metallization tool
> (electron-beam evaporation and pulsed DC sputtering combination) from
> Angstrom Engineering (angstromengineering.com), and I wanted to solicit
> feedback from list members who have experience with Angstrom’s tools.  In
> addition to general feedback, I’m also looking for information on the
> following from any list members who have used or maintained Angstrom’s
> e-beam evaporation or sputtering tools:
>
>
>
> 1.       Do you and your users have a successful track record of
> performing electron-beam evaporation and liftoff with Angstrom tools,
> including PMMA resist?  We have been quoted for a “Nebula” chamber, so I’d
> love to hear from anyone who has direct experience with that chamber
> geometry.
>
> 2.       What has your experience been like with Angstrom’s customers
> service?
>
> 3.       What is your experience of the control/automation software on
> the system?  Once the sample is loaded, can how much user intervention is
> required if a recipe is already developed?
>
>
>
> Please send your feedback directly to me at
> adam.neal.3 at us.af.mil;adam.t.neal at gmail.com
> <adam.neal.3 at us.af.mil;adam.t.neal at gmail.com?subject=Re:%20Angstrom%20Engineering>.
> Thank you in advance for any feedback you can provide.
>
>
>
> Adam T. Neal, Ph.D.
>
> Research Electrical Engineer
>
> Acting Research Team Lead
>
> Agile RF Electronics Team
>
> Materials and Manufacturing Directorate
>
> Air Force Research Laboratory
>
> E-mail: adam.neal.3 at us.af.mil;adam.t.neal at gmail.com
> <adam.neal.3 at us.af.mil;adam.t.neal at gmail.com?subject=Re:%20Angstrom%20Engineering>
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>
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