[labnetwork] ALD venting precautions

[Hathaway, Malcolm R]

Hi Zuzanna,

We vent our exhaust from our fomblin-base pump into our general exhaust (not sure at the moment if it's the solvent or acid-gas exhaust, we're shut down at the moment).

The volumes of process gas involved are miniscule if your recipe are set up correctly, so that very little abatement is necessary, compared to what one expects for a CVD system.

What many manufacturers are doing these days (an easy retrofit, as well) is to place a mist filter just prior to the pump, which provides a large surface for "wetting out" of any excess precursor, thus allowing this precursor to react into oxide (generally) before entering the pump.  This reduces the volume of reactive gases still further, and keeps your pump happy for a longer period.  The reaction products coat the filter element, which gets cleaned or changed out every few years.

Do you plan to install a commercial system, or a home-made one?

Mac Hathaway
Senior Process and Systems Engineer
Harvard CNS
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Zuzanna A. Lewicka <zlewicka at princeton.edu>
Sent: Friday, March 27, 2020 5:47 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] ALD venting precautions


Dear Labnetwork Community,



We are trying to get more information about appropriate venting precautions (e.g. proper exhaust abatement system or just heated ALD trap) for Thermal Atomic Layer Deposition System configured for alumina, hafnia and titania on Si, GaAs, and InP substrates. We would appreciate if you could share your experiences and solutions at your facilities.



Thank you,

Zuzanna Lewicka



Senior Research Specialist

Princeton Institute for the Science and Technology of Materials (PRISM) Cleanroom

Email: zlewicka at princeton.edu<https://urldefense.proofpoint.com/v2/url?u=https-3A__owa.princeton.edu_owa_redir.aspx-3FC-3D-5Fobjl9mq7yUMTgAiqvOi4fXDy7oF3uDvC7guzRPqpQi1k7GZDK-5FVCA..-26URL-3Dmailto-253azlewicka-2540princeton.edu&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=H2eHOHgwCSx5yx4sT24izIBIbxGKsmMOVUcp73oX52w&s=BguTXvbuS_Wr5MDvs33YNFVxFo7buP3du3f2BySz0-k&e=>




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