[labnetwork] Silicon ebeam evaporation

[John Hagopian]

We have successfully sputtered silicon if that helps.

John

Sent from my iPhone

> On Nov 28, 2020, at 12:48 PM, Shimon Eliav <shimonel at savion.huji.ac.il> wrote:
> 
> 
> Hi Chris,
>  
> Some months ago I developed an e-beam recipe for Si evaporation.
>  
> I used FABMATE crucible and very standard procedure for e-beam deposition using a Telemark 6kW source (Soak 1, Ramp1, Ramp2, Soak 2 and Deposition phase). The rate deposition was set to 0.5 A/sec and we use to deposit 80nm layers followed by successful  lift-off process. In the end of the process the crucible is cooled down gently to avoid cracks.
>  
> The crucible survives the process and can be used many times. The deposition process itself is smooth. The chamber receives a brown color by the end of the deposition and for this thickness range we had not flakes.
>  
> If you need more details feel free to contact me.
>  
> Regards,
>  
> Shimon
> The Unit for Nano Fabrication
> The Hebrew University of Jerusalem
> ISRAEL
>  
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Christopher Balicki
> Sent: Friday, 27 November 2020 21:39
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Silicon ebeam evaporation
>  
> Hi All,
>  
> Hope you are all well and keeping safe.
>  
> We have received some interest from our users to provide a silicon evaporation process. Based on initial investigation, it appears that thermal evaporation is pretty much impossible and that ebeam evaporation could yield some results. That said, molten silicon is corrosive and pretty much alloys with anything it touches. If we were to use a crucible liner, the top candidate liner materials are copper, tantalum, and tungsten, however, liner lifetime and performance is unknown. And if we were to evaporate directly in the copper hearth, this would permanently assign the pocket to silicon, and potentially necessitate a hearth replacement at some point.
>  
> Our top concerns are to (of course) maintain the safety and reliability of our PVD systems for our whole userbase. A silicon evaporation process would have to be robust and not cause excessive equipment downtime.
>  
> Any advice and/or recommendations based on experience would be highly appreciated!
>  
> Cheers,
> Chris
>  
> Christopher Balicki
> Fabrication and Prototyping Manager | 4D LABS
> Simon Fraser University | TASC 2
> 8888 University Dr., Burnaby, B.C. V5A 1S6
> T: 778 782 9322 | F: 778 782 3765 | www.4dlabs.ca
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>  
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