[labnetwork] ZnO Sputtering

[Norman J Gottron]

Hi All,

I was wondering if anyone in the LabNetwork community could sputter a couple hundred nm of ZnO on a fee-for-service basis for an external user.  The substrate would be a 4" Si wafer.  We typically avoid Zn/ZnO in our lab due to contamination concerns, but I'm hoping someone out there has a dedicated system.  If so, please reach out.

Regards,

Norman Gottron
Process Engineer, Claire and John Bertucci Nanotechnology Laboratory
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave
Pittsburgh, PA 15213
Phone: 412-268-4205
www.ece.cmu.edu<http://www.ece.cmu.edu/>
www.nanofab.ece.cmu.edu<http://www.nanofab.ece.cmu.edu/>

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