[labnetwork] STS DRIE mass flow controller programming

[Roy Cork]

Hi Patrick,

When you say an original STS ASE DRIE system can you please give some details on the software? Is it Win 3.1, a so called trinity PC or a PRO tool?

It sounds like they have scaled the software (or even made a mistake, maybe the MFC has been changed?) If the MFC is 500sccm but the software is only allowing 50sccm to be selected then 50 will give you 5V to the MFC and an actual flow of 500sccm (normally the software scaling would be the other way around so 500sccm in the recipe to an actual 50sccm MFC to give you some accuracy control, 355sccm in recipe to give 35.5 actual flow).

This control voltage can be easily checked by measuring the SP pin on the MFC connector. Run a recipe with 50sccm and measure the voltage. If it is 5V then you are actually flowing 500sccm (if that is the full range of the MFC). Also check that the MFC is calibrated for SF6 sometimes they are N2 calibrated (there is a 0.26 conversion factor 500sccm x 0.26 gives an actual SF6 flow of 130sccm max). Normally the software would take this into account.

Today you are able to buy MFC’s that can be re-programmed in-situ within a certain Window but you would need the correct software and cables to do that and I’m sure the older SPTS didn’t use this type.

We may be able to help if you would like to change the software settings to match the MFC, just write some more details also about the software. There is some risk involved though changing software settings and MFC gas settings so it would be at your own risk. Crashed software cannot always be fixed these days and SPTS may not be able to help you recover the system.

It would be easier for you to just change the MFC, keep the 50sccm setting but just calculate the difference if you are unsure with the software.

Best regards
Roy Cork
DTU Nanolab
Denmark

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Patrick Roman
Sent: 19. oktober 2020 20:21
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] STS DRIE mass flow controller programming

Greetings,

I have an original STS ASE DRIE system that needs to have the SF6 input increased to optimize silicon etching performance.  My SF6 MFC is limited to 50 sccm in the software settings and I would like to increase that limit to 150 sccm.  The hardware has 500 sccm capability.  Does anyone have this experience/know how?  Thanks in advance!!!

Regards,

Patrick Roman, PhD
Associate Professor of Research

Mechanical and Materials Engineering

Assistant Director, AMERI<http://ameri.fiu.edu/>

R&D Engineer, GFJC<https://gfjc.fiu.edu/>, NFSTC<https://www.nfstc.org/>

College of Engineering and Computing
Florida International University
10555 West Flagler Street, EC3355
Miami, Florida  33174
Tel (305) 348-1651
Fax (305) 348-1932
Cell (202) 294-8602
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