[labnetwork] STS ASE DRIE chiller

[Kevin Owen]

Pretty much all of our RIE tools run Fluorinert (FC-3283, or the Galden
equivalent). You'll want a chiller that is designed to run that fluid
though, and furthermore I would strongly recommend against putting it in
any chiller that previously had water in it (they do not mix). That said, I
think that's a pretty common fluid at least for electrostatic chucks, and
works well down to -20C.

-Kevin

On Mon, Apr 5, 2021 at 12:10 PM Bruce Tolleson <betemc at rit.edu> wrote:

> Dear Labnetwork,
>
> Our STS ASE uses an Affinity RWA-12T-CE55CBD4 chiller with an external
> D.I. cartridge to keep the conductivity low. It works well for us.
>
> Thank you,
>
>
>
> Bruce E. Tolleson
>
> Rochester Institute of Technology
>
> 82  Lomb Memorial Drive, Bldg 17-2627
>
> Rochester, NY 14623-5604
>
> (585) 478-3836
>
> [image: http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Beall,
> James A. (Fed)
> *Sent:* Friday, April 2, 2021 3:54 PM
> *To:* Patrick Roman <proma016 at fiu.edu>
> *Cc:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] STS ASE DRIE chiller
>
>
>
> Our SPTS Pegasus uses Galden HT135 in an SMC HRZ chiller for platen
> cooling.
>
>
>
> Jim
>
>
>
> Jim Beall
>
> NIST Boulder Microfabrication Facility
>
>
>
> On Apr 2, 2021, at 1:01 PM, Patrick Roman <proma016 at fiu.edu> wrote:
>
>
>
> Greetings!  Our Drie system uses a chiller with distilled water for
> the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
> processes, eg silicon etching?
>
> Patrick Roman
>
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-- 
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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