[labnetwork] ZEP worth it?

[Kevin Owen]

Chang,

I've found ZEP is way more stable when used as a plasma etch mask; I swear
PMMA etches if you look at it cross-eyed... I don't typically handle the
ZEP myself, but I am pretty sure the bottle we keep in the fridge (gotta
keep it in the fridge) has lasted quite a long time.

-Kevin

On Thu, Apr 29, 2021 at 11:48 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210429/072c8d90/attachment.html>