[labnetwork] Super / Ultra low stress LPCVD nitride deposition

[Morrison, Richard H., Jr]

Try Rogue  Valley Micro I have used them before they are very good.

https://roguevalleymicrodevices.com/


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aaron Mueller
Sent: Monday, December 13, 2021 9:34 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Super / Ultra low stress LPCVD nitride deposition

Dear all,

My group, among other activities, makes MEMS chips with nitride membranes. Ideally, because I think it would be more economical, I am wondering if anyone knows a facility that can deposit super or ultra low stress LPCVD silicon nitride (180nm) on 300/400um thick 4"silicon wafers. Or perhaps this is not a good idea as the achievable membrane performance may depend on the bow/warp/etc. of the silicon wafers. Alternatively, I would like to find a wafer vendor that can target such a low stress nitride coating at a reasonable price.

I'm looking for something less than 50MPa tensile stress, maybe closer to zero. I've used low stress ( nominally <250MPa) and now super low stress (nominally <100MPa, paid about 100USD per wafer for 25 wafers, would be willing to pay a bit more), but my nitride membranes are still breaking more than is acceptable.

I am aware that our application is demanding, as the membranes are quite large (440um x 440um), and we often make holes through them, either with RIE (before the membranes are suspended) or FIB (after).

I would be very grateful for any suggestions. Thanks!

Best Regards,
Aaron

Aaron Mueller, PhD
Research Fellow
School of Materials Science and Engineering
Nanyang Technological University
Singapore


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