[labnetwork] Kanto Chemical BOSE IGZO etchant

[Chong Lee]

Thanks Rick for kind reply.  I found Williams reference.  Found KOH, 5:1 BHF, and CR-7 will not attack Mo, but no way to find out if they will etch IGZO.

I am still curious if anyone has or used Kanto IGZO etchant.  Even better if there is a compatibility chart.

                              Chong

From: Morrison, Richard H., Jr <rmorrison at draper.com>
Sent: Wednesday, February 17, 2021 1:44 PM
To: Chong Lee <chonglee at mit.edu>; labnetwork at mtl.mit.edu
Subject: RE: Kanto Chemical BOSE IGZO etchant

Get the SDS of the etchant and see what the etch is made out of.

Then there are on line chemical compatibility charts and see what etches the metals of interest.

Good resource is the CRC Physics and Chemistry handbook and back in the late 1990 there was a paper published by Berkeley that listed etch rates for a tone of semiconductor material, I think the author was Kirt Williams? It was a 2 part article.

Rick

Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
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From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chong Lee
Sent: Wednesday, February 17, 2021 11:54 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Kanto Chemical BOSE IGZO etchant

I am new to this email list, let me know if this is appropriate to ask:

Does anyone know if above etchant will attack common metals like Al and Mo?  Where would I look for data or compatibility chart?

Has anyone used it at MTL before?

                              Chong

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