[labnetwork] On-line teaching reference for simple microfabrication

[Stephen Howe]

MKS wrote "MKS Instruments Handbook Semiconductor Devices and Process
Technology" which is a good overview of everything.I think you can
download the PDF from their website still , or else you could send an
email to the Office of the CTO.

-- 

Yours Sincerely,

SDI Fabsurplus LLC
Stephen Howe
Company Owner
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On Wed, 2021-02-17 at 17:51 -0500, Orad Reshef wrote:
> Hey Jim,
> 
> I drafted a helpful intro chapter that I share with my students.
> Maybe this can be helpful to you:
> 
http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf
> Best,
> Orad
> 
> On Wed, Feb 17, 2021 at 5:19 PM James C. Sturm <sturm at princeton.edu>
> wrote:
> > 
> > 
> > 
> > 
> > 
> > 
> > I’m looking for a simple straightforward on-line teaching reference
> > for simple microfabrication with clear schematic step by step
> > figures.  
> > 
> > 
> > i.                    
> > How you can use photolithography to pattern a selective etch, or
> > for liftoff,
> > 
> > ii.                  
> > Some figures and qualitative description of some different thin
> > film formation or deposition methods
> > 
> > iii.                
> >  A few simple integrated processes to make a device of some sort.
> > I’m sure they are out there.
> > Thanks, Jim Sturm
> >  
> > 
> > 
> > 
> > _______________________________________________
> > 
> > labnetwork mailing list
> > 
> > labnetwork at mtl.mit.edu
> > 
> > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> > 
> 
> -- 
> Orad Reshef, PhD
> 
> Département de physique | Department of Physics
> Université d’Ottawa | University of Ottawa
> boydnlo.ca | reshef.ca
> 
> 
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