[labnetwork] On-line teaching reference for simple microfabrication

Martin,Michael David michael.martin at louisville.edu
Thu Feb 18 09:24:00 EST 2021


Hi,
   At U. of Louisville we've been experimenting with our YouTube production and run a channel called Practical Microfabrication.  It really isn't centered on a formal class-like structure but is aimed at more of an edutainment approach. We started out with video SOP's and decided they were insanely boring.  So recently we've been exploring project focused videos where we show the fabrication steps in some detail, along with showing the project traveler.  Of course, the projects are chosen so that there are no IP issues which allows us to go into excruciating detail while addressing the practical aspects of running a project through the fab.  The tone is kept light and informal like we were teaching a grad student one-on-one.

https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q
[https://yt3.ggpht.com/ytc/AAUvwnj2XTs3VRT5AxgovDj6yIYe7p3n9RGKC0HDwUY2=s900-c-k-c0x00ffffff-no-rj]<https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q>
Practical Microfabrication<https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q>
www.youtube.com
Regards,
   Michael
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Allison Dove <adove at berkeley.edu>
Sent: Wednesday, February 17, 2021 3:49 PM
To: James C. Sturm <sturm at princeton.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] On-line teaching reference for simple microfabrication


CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.

We have a bunch of these materials in our Equipment manual<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fnanolab.berkeley.edu%2Fpublic%2Fmanuals%2Fequipment_manual.shtml&data=04%7C01%7Cmichael.martin%40louisville.edu%7Cd628db3882f74dbd4b0808d8d3a5ad07%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637492056547872353%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=OODnYeXzb3NSsG2ZKv68R7Q1n%2B5FYbo2GCmV2QNPPOs%3D&reserved=0>.

Look for any link with the word "class". There are slides as well as videos.

Lithoclass: https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdocs.google.com%2Fdocument%2Fd%2F180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso%2Fedit%23heading%3Dh.2w3i6baqm8n8&data=04%7C01%7Cmichael.martin%40louisville.edu%7Cd628db3882f74dbd4b0808d8d3a5ad07%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637492056547882309%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=5LWglj6JEIJdXLgrPoPFuAhiI%2BCaNBcwXtISGMXlV64%3D&reserved=0>
Evapclass: https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdocs.google.com%2Fdocument%2Fd%2F1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U%2Fedit&data=04%7C01%7Cmichael.martin%40louisville.edu%7Cd628db3882f74dbd4b0808d8d3a5ad07%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637492056547882309%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=erCIU8N3rBXizvcDyb6NAwqVud1EKBeWpJ2YjetISME%3D&reserved=0>
Etchclass: https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdocs.google.com%2Fdocument%2Fd%2F1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40%2Fedit&data=04%7C01%7Cmichael.martin%40louisville.edu%7Cd628db3882f74dbd4b0808d8d3a5ad07%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637492056547892267%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=1D5Ev%2FeAY06Sb1T00Erykwc5mKQV5UGhRW%2Byh%2B0JUkE%3D&reserved=0>

-Allison


On Wed, Feb 17, 2021 at 12:43 PM James C. Sturm <sturm at princeton.edu<mailto:sturm at princeton.edu>> wrote:

I’m looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.

i.                     How you can use photolithography to pattern a selective etch, or for liftoff,

ii.                   Some figures and qualitative description of some different thin film formation or deposition methods

iii.                  A few simple integrated processes to make a device of some sort.

I’m sure they are out there.

Thanks, Jim Sturm



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--
Allison Dove
Process Engineer
Marvell Nanofabrication Laboratory
UC Berkeley
adove at berkeley.edu<mailto:adove at berkeley.edu>
Pronouns: she/her
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