[labnetwork] On-line teaching reference for simple microfabrication

[Allison Dove]

We have a bunch of these materials in our Equipment manual
<https://nanolab.berkeley.edu/public/manuals/equipment_manual.shtml>.

Look for any link with the word "class". There are slides as well as videos.

Lithoclass:
https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8
Evapclass:
https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit
Etchclass:
https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit

-Allison


On Wed, Feb 17, 2021 at 12:43 PM James C. Sturm <sturm at princeton.edu> wrote:

> I’m looking for a simple straightforward on-line teaching reference for
> simple microfabrication with clear schematic step by step figures.
>
> i.                     How you can use photolithography to pattern a
> selective etch, or for liftoff,
>
> ii.                   Some figures and qualitative description of some
> different thin film formation or deposition methods
>
> iii.                  A few simple integrated processes to make a device
> of some sort.
>
> I’m sure they are out there.
>
> Thanks, Jim Sturm
>
>
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-- 
Allison Dove
Process Engineer
Marvell Nanofabrication Laboratory
UC Berkeley
adove at berkeley.edu
Pronouns: she/her
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