[labnetwork] Tepla PS210 question

Tue Jan 26 10:42:14 EST 2021

Hi Scott and others.
It turns out we may be ok.  Tepla said the output value we are seeing is bogus(shouldn't be showing up) and that some flickering of the microwave plamsa is normal.
We are going to be running some etch rate tests to confirm everything is ok,  although we may have a bad or weakening magnetron.

Thanks
Rob

From: Scott Blondell <spb1699 at rit.edu>
Sent: January 26, 2021 10:08 AM
To: Jeff Salzmann <jsalzmann at pcb.com>; Robert Vandusen <RobertVandusen at cunet.carleton.ca>; labnetwork at mtl.mit.edu
Subject: RE: Tepla PS210 question

[External Email]
Robert, as Jeff mentioned, visually check your tunable caps and other components for any signs of arcing/overheating. Do you have any indication of reflected power levels?

Verify all power connections are clean and tight. Is there excessive build-up of resist residue, etc. on the electrode insulators? This would manifest
as arcing or flickering plasma and higher than normal reflected power. Any reason to suspect the power source (tube or solid state section) of the supply is reaching end of life?

Do you have an RF power meter and/or dummy load you can use as a test to eliminate the chamber being the problem?

Not sure how to interpret the discrepancy between your power readings.

Regards,

Scott P. Blondell
Facilities Manager
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory<http://www.smfl.rit.edu/>
82 Lomb Memorial Dr.
Bldg. 17-2519
Rochester, NY 14623

585 738-4073 c
585 475-2171 o
585 475-5041 f
spb1699 at rit.edu<mailto:spb1699 at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>

[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Jeff Salzmann
Sent: Monday, January 25, 2021 4:53 PM
To: Robert Vandusen <RobertVandusen at cunet.carleton.ca<mailto:RobertVandusen at cunet.carleton.ca>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Tepla PS210 question

Robert,

If you can observe it, see how long the match takes to tune. You might have a blown air-cap (they arc from time to time) and they'll try to tune for a long period of time.

I don't use a Tepla system but I have seen this on old Matrix ashers in need of new match networks.

Any questions, contact me directly.

Good luck,
Jeff

[cid:image002.png at 01D6F3CD.2CBA9940]<http://www.pcb.com/>

Jeff Salzmann
Research and Development Engineering
PCB Piezotronics<http://www.pcb.com/> | 716 684 0002 ext 2907

[cid:image003.jpg at 01D6F3CD.2CBA9940]

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Robert Vandusen
Sent: Monday, January 25, 2021 14:35
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Tepla PS210 question

External Email Notice: This email originated from outside the MTS / PCB organization.

Hello community.
I have a question for anyone who may have a Tepla PS210 plasma ashing system.
We have noticed that our plasma may look dimmer and more unstable than normal.
We seem to be etching but need to verify our etch rates.

One of the things we noticed is that even thought actual power output display on the runscreen is reading the setpoint of 500W,
on the maintenance screen we see a value of ~ 120 on the output.  I would have expected this to read to close to the setpoint,
but we are not completely sure if this is problem as we hadn't looked at this before.
Tepla hasn't  been able to confirm for sure whether this is a problem.
If someone would be able to check on another system to confirm that would be great.
[cid:image004.jpg at 01D6F3CD.2CBA9940]
[cid:image005.jpg at 01D6F3CD.2CBA9940]

Thanks
Rob
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600<tel:613-520-2600> ext 5761
Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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