[labnetwork] A vacuum pump for a spin coater

Xin (Shane) GUO sguo18 at yorku.ca
Tue Jul 6 09:58:18 EDT 2021


Hi guys

We have two spin coaters that need a vacuum pump. Considering the budget, I
prefer to get a pump to run both units. Is it possible to get any low-cost
pump for this purpose? Any recommendations of the choice of a pump?
Another issue is the flow rate. One of the spin coater suppliers
suggested a flow rate of 1.6 to 4.5 SCFM (0.11 cubic meters/minute) at 0
inches Hg while the other supplier didn't specify the flow rate requirement.
I am not sure how flow rate matters for this type of application. When your
lab ordered a pump for your spin coater, did you consider the flow rate?

Thank you for all your suggestions in advance.

Best
Shane
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